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1.
Computational lithography / Xu Ma and Gonzalo R. Arce. by Series: Wiley series in pure and applied optics
Publication details: Hoboken, N.J. : Wiley, 2010
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7872.M3M33 3.

2.
Fundamental principles of optical lithography : the science of microfabrication / Chris Mack by
Publication details: Chichester, England : John Wiley & Sons, 2007
Online resources:
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7874.M25 3.

3.
Lithography / Stefan Landis. by
Publication details: Hoboken, NJ : Wiley-ISTE, 2010
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7872.M3 L336 3.

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Microlithography : process technology for ic fabrication / David J. Elliott. by
Publication details: New York : Mc Graw-Hill Book Company, 1986
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7874.E495.

6.
Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith by
Publication details: New York : Marcel Dekker, 1998
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7836.M525 3.

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Nano-lithography / edited by Stefan Landis. by Language: English Original language: French
Publication details: Hoboken, NJ : Wiley, 2011
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7872.M3N34413 3.

9.
Nanolithography and patterning techniques in microelectonics / edited by David G. Bucknall by Series: Woodhead Publishing in materials
Publication details: Cambridge, England : Woodhead Pub., 2005
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (2)Call number: TK7874.N328 3, ...

10.
Optical lithography : here is why / Burn J. Lin. by
Publication details: Bellingham, Wash. : SPIE, 2009
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7872.M3L565 3. PERPUSTAKAAN TUN SERI LANANG (1)Call number: TK7872.M3.L565.

11.
Polymers for high technology : electronics and photonics / Murrae J. Bowden, editor, S. Richard Turner, editor by Series: ACS symposium series ; 346
Publication details: Washington, DC : American Chemical Society, 1987
Other title:
  • Polymers for high techonology
Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7871.15.P6P624.

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