Nano-lithography / edited by Stefan Landis.
Language: English Original language: French Publication details: Hoboken, NJ : Wiley, 2011.Description: xxv, 325 p. : ill. ; 24 cmISBN:- 9781848212114 (hbk.)
- 1848212119
- Nanolithography English
| Item type | Current library | Home library | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|
| AM | PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA | TK7872.M3N34413 3 (Browse shelf(Opens below)) | 1 | Available | 00002054923 |
Includes bibliographical references and index.
Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography.
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