Lithography / Stefan Landis.

By:

Landis, Stefan

Publication details: Hoboken, NJ : Wiley-ISTE, 2010.Description: xv, 377 p. : ill. ; 24 cmISBN:

9781848212022

Subject(s):

Summary: 'Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components'-- Provided by publisher.

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Holdings
Item type	Current library	Home library	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TK7872.M3 L336 3 (Browse shelf(Opens below))		1	Available		00002034668

Includes bibliographical references and index.

'Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components'-- Provided by publisher.

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Lithography / Stefan Landis.

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