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Microlithography : high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989 / editors, Aldo Craievich, G. Gerson Bezerra de Souza, Victor Baranauskas.

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Publication details: Singapore : World Scientific, 1990.Description: 184 p. ; 26 cmISBN:

9810201370

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Item type	Current library	Home library	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TK7874.M494 (Browse shelf(Opens below))		1	Available		00000174822

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