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Microlithography : high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989 /

Microlithography : high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989 / editors, Aldo Craievich, G. Gerson Bezerra de Souza, Victor Baranauskas. - Singapore : World Scientific, 1990. - 184 p. ; 26 cm.

ISBN: 9810201370

Subjects--Topical Terms:
Microlithography--Congresses.
Microelectronics--Congresses.

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Microlithography : high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989 /

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