Handbook of silicon wafer cleaning technology / edited by Karen A. Reinhardt, Werner Kern

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Series: Materials science and process technology seriesPublication details: Norwich, New York : William Andrew, 2008Edition: 2nd edDescription: xxvi, 718 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Home library	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN TUN SERI LANANG	PERPUSTAKAAN TUN SERI LANANG KOLEKSI AM-P. TUN SERI LANANG (ARAS 5)	TK7871.85.H366 2008 3 (Browse shelf(Opens below))		1	Available		00001558881

Includes bibliographical references and index

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