MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01230cam a2200337 a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20250930124256.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
080530s2008 ne a bi 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780815515548 |
| Terms of availability |
RM881.46 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0815515545 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
200811201008 |
| Level of effort used to assign nonsubject heading access points |
lan |
| Level of effort used to assign subject headings |
200811200927 |
| Level of effort used to assign classification |
lan |
| Level of effort used to assign subject headings |
200811141212 |
| Level of effort used to assign classification |
rahah |
| y |
05-30-2008 |
| z |
fakrul |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UKM |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85.H366 2008 3 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85 |
| Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) |
.H366 2008 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Handbook of silicon wafer cleaning technology / |
| Statement of responsibility, etc. |
edited by Karen A. Reinhardt, Werner Kern |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Norwich, New York : |
| Name of publisher, distributor, etc. |
William Andrew, |
| Date of publication, distribution, etc. |
2008 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxvi, 718 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Materials science & process technology series |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon-on-insulator technology |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Reinhardt, Karen A. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Kern, Werner, |
| Dates associated with a name |
1925- |
| 9 (RLIN) |
39128 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Materials science and process technology series |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
|---|
| a |
.b14203595 |
| b |
2021-05-28 |
| c |
2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
AM |
| Suppress in OPAC |
No |
| Call number prefix |
TK7871.85.H366 2008 3 |
| 914 ## - VTLS Number |
|---|
| VTLS Number |
vtls003378264 |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] |
|---|
| Link information for 9XX fields |
rab |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) |
|---|
| a |
Institut Kej. Mikro & Nanoelektronik |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) |
|---|
| Library |
PERPUSTAKAAN TUN SERI LANANG |
| Operator's initials, OID (RLIN) |
2008-04-05 |
| Cataloger's initials, CIN (RLIN) |
m |
| Material Type (Sierra) |
Printed Books |
| Language |
English |
| Country |
|
| -- |
0 |
| -- |
.b14203595 |
