Handbook of silicon wafer cleaning technology /
Handbook of silicon wafer cleaning technology /
edited by Karen A. Reinhardt, Werner Kern
- 2nd ed.
- Norwich, New York : William Andrew, 2008
- xxvi, 718 p. : ill. ; 24 cm.
- Materials science & process technology series .
- Materials science and process technology series .
Includes bibliographical references and index
9780815515548 RM881.46 0815515545
Silicon-on-insulator technology
Includes bibliographical references and index
9780815515548 RM881.46 0815515545
Silicon-on-insulator technology