Chemical physics of thin film deposition processes for micro- and nano-technologies / edited by Yves Pauleau

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Series: NATO science series. Series II, Mathematics, physics, and chemistry ; ; v. 55Publication details: Dordrecht : Kluwer Academic Publishers, 2002Description: xiii, 363 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Home library	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN DR ABDUL LATIFF	PERPUSTAKAAN DR ABDUL LATIFF KOLEKSI AM-P. DR ABDUL LATIFF	TA418.9.T45C483 3 (Browse shelf(Opens below))		1	Available		00001330316

'Published in cooperation with NATO Scientific Affairs Division.'

Includes bibliographical references and index

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