Chemical physics of thin film deposition processes for micro- and nano-technologies / (Record no. 331413)

MARC details
000 -LEADER
fixed length control field 01274nam a2200313 a 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20250930115350.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 040120s2002 ne a b 101 0 eng
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 2002-072962
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 1402005245 (alk. paper)
Terms of availability RM627.12
039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE]
Level of rules in bibliographic description 200402170857
Level of effort used to assign nonsubject heading access points hamudah
Level of effort used to assign subject headings 200402161558
Level of effort used to assign classification nuri
Level of effort used to assign subject headings 200402111152
Level of effort used to assign classification farid
Level of effort used to assign subject headings 200401201151
Level of effort used to assign classification sanusi
y 01-20-2004
z sanusi
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN)
Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) TA418.9.T45C483 3
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN)
Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) TA418.9
245 00 - TITLE STATEMENT
Title Chemical physics of thin film deposition processes for micro- and nano-technologies /
Statement of responsibility, etc. edited by Yves Pauleau
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Dordrecht :
Name of publisher, distributor, etc. Kluwer Academic Publishers,
Date of publication, distribution, etc. 2002
300 ## - PHYSICAL DESCRIPTION
Extent xiii, 363 p. :
Other physical details ill. ;
Dimensions 25 cm.
440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE
Title NATO science series.
Number of part/section of a work Series II,
Name of part/section of a work Mathematics, physics, and chemistry ;
Volume/sequential designation v. 55
500 ## - GENERAL NOTE
General note 'Published in cooperation with NATO Scientific Affairs Division.'
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Thin films
Form subdivision Congresses
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Nanotechnology
Form subdivision Congresses
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Pauleau, Yves
9 (RLIN) 54294
907 ## - LOCAL DATA ELEMENT G, LDG (RLIN)
a .b13320026
b 2021-05-28
c 2019-11-12
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type AM
Suppress in OPAC No
Call number prefix TA418.9.T45C483 3
914 ## - VTLS Number
VTLS Number vtls000346886
990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA]
Link information for 9XX fields fa
991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT)
a Institut Kejuruteraan Mokro & Nanoelektronik
998 ## - LOCAL CONTROL INFORMATION (RLIN)
Library PERPUSTAKAAN DR ABDUL LATIFF
Operator's initials, OID (RLIN) 2004-07-01
Cataloger's initials, CIN (RLIN) m
Material Type (Sierra) Printed Books
Language English
Country
-- 0
-- .b13320026
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Source of acquisition Cost, normal purchase price Inventory number Total checkouts Full call number Barcode Date last seen Copy number Price effective from Koha item type
        PERPUSTAKAAN DR ABDUL LATIFF PERPUSTAKAAN DR ABDUL LATIFF KOLEKSI AM-P. DR ABDUL LATIFF 12/11/2019 - 627.12 .i17417284 4 TA418.9.T45C483 3 00001330316 14/09/2025 1 14/09/2025 AM

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