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Chemical physics of thin film deposition processes for micro- and nano-technologies /

Chemical physics of thin film deposition processes for micro- and nano-technologies / edited by Yves Pauleau - Dordrecht : Kluwer Academic Publishers, 2002 - xiii, 363 p. : ill. ; 25 cm. - NATO science series. Series II, Mathematics, physics, and chemistry ; v. 55 .

'Published in cooperation with NATO Scientific Affairs Division.'

Includes bibliographical references and index

ISBN: 1402005245 (alk. paper) RM627.12

LCCN: 2002-072962

Subjects--Topical Terms:
Thin films--Congresses
Nanotechnology--Congresses

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Chemical physics of thin film deposition processes for micro- and nano-technologies /

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