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	1.	MEMS and microsystems : design and manufacture / Tai-Ran Hsu. by Hsu, Tai-Ran Publication details: Boston : McGraw-Hill, 2002 Online resources: Publisher description Table of contents Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7874.H784. Place hold
	2.	Mems and microsystems : design, manufacture, and packaging / Tai-Ran Hsu by Hsu, Tai-Ran Edition: 2nd ed. Publication details: Hoboken, N. J. : John Wiley & Sons, 2008 Online resources: Table of contents only Availability: Items available for loan: PERPUSTAKAAN LINGKUNGAN KEDUA (1)Call number: TK7874.H784 2008 3. Place hold

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