Mems and microsystems : design, manufacture, and packaging / Tai-Ran Hsu

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Publication details: Hoboken, N. J. : John Wiley & Sons, 2008Edition: 2nd edDescription: xxv, 550 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Home library	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TK7874.H784 2008 3 (Browse shelf(Opens below))		1	Available		00001499626

Includes bibliographical references and index

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