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Mems and microsystems : design, manufacture, and packaging /

Hsu, Tai-Ran

Mems and microsystems : design, manufacture, and packaging / Tai-Ran Hsu - 2nd ed. - Hoboken, N. J. : John Wiley & Sons, 2008 - xxv, 550 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9780470083017 (hbk.) RM415.02

Subjects--Topical Terms:
Microelectronics
Microelectromechanical systems
Microelectronic packaging

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