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Silicon devices and process integration [electronic resource] : deep submicron and nano-scale technologies / by Badih El-Kareh.

By: Contributor(s): Publication details: Boston, MA : Springer US, 2009.Description: xxv, 597 pages : illustrations,digital ; 24 cmISBN:
  • 9780387690100
  • 9780387367989
Subject(s): DDC classification:
  • 621.3815 22
Online resources: In: Springer eBooks
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