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Silicon devices and process integration deep submicron and nano-scale technologies /

El-Kareh, Badih.

Silicon devices and process integration deep submicron and nano-scale technologies / [electronic resource] : by Badih El-Kareh. - Boston, MA : Springer US, 2009. - xxv, 597 pages : illustrations,digital ; 24 cm.

ISBN: 9780387690100 9780387367989 RM378.71

Subjects--Topical Terms:
Metal oxide semiconductors, Complementary.
Linear integrated circuits--Design.
Electronics and Microelectronics, Instrumentation.
Electrical Engineering.
Materials Science, general.
Circuits and Systems.

Dewey Class. No.: 621.3815

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Silicon devices and process integration deep submicron and nano-scale technologies /

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