MEMS/NEMS [electronic resource] : Handbook Techniques and Applications / edited by Cornelius T. Leondes.
Publication details: Boston, MA : Springer Science+Business Media, Inc., 2006.Description: v. : ill., digital ; 25 cmISBN:- 9780387257860 (electronic bk.)
- 9780387245201 (paper)
- 620.5 22
- TK153 .M446 2006
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