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MEMS/NEMS Handbook Techniques and Applications /

MEMS/NEMS Handbook Techniques and Applications / [electronic resource] : edited by Cornelius T. Leondes. - Boston, MA : Springer Science+Business Media, Inc., 2006. - v. : ill., digital ; 25 cm.

ISBN: 9780387257860 (electronic bk.) 9780387245201 (paper)

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
Nanotechnology.

LC Class. No.: TK153 / .M446 2006

Dewey Class. No.: 620.5

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