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Understanding MEMS : principles and applications / Luis Castaner.
Publisher: Hoboken, New Jersey : John Wiley & Sons, 2015Publisher: ©2015Description: xiv,314 pages ; 25 cmContent type:- text
- unmediated
- volume
- 9781119055426
- spine title : undestanding MEMS
Contents:
Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
| Item type | Current library | Home library | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|---|---|
| AM | PERPUSTAKAAN LINGKUNGAN KEDUA | PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA | TK7875.C37 (Browse shelf(Opens below)) | 1 | Available | 00002188798 |
Includes bibliographical references and index.
Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
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