Understanding MEMS : principles and applications /
Castaner, Luis,
Understanding MEMS : principles and applications / spine title : undestanding MEMS. Luis Castaner. - xiv,314 pages ; 25 cm.
Includes bibliographical references and index.
Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
9781119055426 RM465.08
Microelectromechanical systems.
Understanding MEMS : principles and applications / spine title : undestanding MEMS. Luis Castaner. - xiv,314 pages ; 25 cm.
Includes bibliographical references and index.
Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
9781119055426 RM465.08
Microelectromechanical systems.