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Precision nanometrology [electronic resource] : sensors and measuring systems for nanomanufacturing / by Wei Gao.

By: Contributor(s): Series: Springer series in advanced manufacturingPublication details: London : Springer-Verlag London, 2010.Description: 1online resource (xiii, 354 pages) : illustrations, digitalISBN:
  • 9781849962544
Subject(s): Online resources: In: Springer eBooks
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