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Precision nanometrology sensors and measuring systems for nanomanufacturing /

Gao, Wei.

Precision nanometrology sensors and measuring systems for nanomanufacturing / [electronic resource] : by Wei Gao. - London : Springer-Verlag London, 2010. - 1online resource (xiii, 354 pages) : illustrations, digital. - Springer series in advanced manufacturing, 1860-5168 .

ISBN: 9781849962544

Subjects--Topical Terms:
Nanostructured materials--Measurement.
Manufacturing, Machines, Tools.
Control , Robotics, Mechatronics.
Nanotechnology.
Measurement Science and Instrumentation.

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Precision nanometrology sensors and measuring systems for nanomanufacturing /

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