Semiconductor industry [electronic resource] : wafer fab exhaust management / J. Michael Sherer

By:

Sherer, J. Michael, 1958-

Publication details: Boca Raton : CRC/Taylor & Francis, 2005ISBN:

1574447203

Other title:

Wafer fab exhaust management

Subject(s):

Semiconductor wafers -- Design and construction
Semiconductor industry -- Environmental aspects
Volatile organic compounds -- Environmental aspects
Air -- Purification -- Technological innovations

DDC classification:

621.3815/2/0286 22

Online resources:

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CRCnetBASE Click here for the electronic version

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Semiconductor industry [electronic resource] : wafer fab exhaust management / J. Michael Sherer

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