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Semiconductor industry wafer fab exhaust management /

Sherer, J. Michael, 1958-

Semiconductor industry wafer fab exhaust management / [electronic resource] : Wafer fab exhaust management J. Michael Sherer - Boca Raton : CRC/Taylor & Francis, 2005

Access to 2http://www.engnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen Includes index

ISBN: 1574447203

LCCN: 2005-050566

Subjects--Topical Terms:
Semiconductor wafers--Design and construction
Semiconductor industry--Environmental aspects
Volatile organic compounds--Environmental aspects
Air--Purification--Technological innovations

Dewey Class. No.: 621.3815/2/0286

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