Force Sensors for Microelectronic Packaging Applications [electronic resource] / by Jurg Schwizer, Michael Mayer, Oliver Brand.
Series: Microtechnology and MEMSPublication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005.Description: viii, 178 p. : ill., digital ; 24 cmISBN:- 9783540269458 (electronic bk.)
- 9783540221876 (paper)
- 621.381046 22
- TK7870.15 .S39 2005
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