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Principles and applications of NanoMEMS physics / edited by Hector De Los Santos.

Contributor(s): Series: Microsystems (Series) ; v. 15.Publication details: Dordrecht, Netherlands : Springer, 2005.Description: vx, 254 p. : ill. ; 24 cmISBN:
  • 1402032382
Subject(s): Online resources:
Contents:
Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave-phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics.
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Item type Current library Home library Call number Materials specified Copy number Status Date due Barcode
AM PERPUSTAKAAN TUN SERI LANANG PERPUSTAKAAN TUN SERI LANANG KOLEKSI AM-P. TUN SERI LANANG (ARAS 5) QC688.P75 (Browse shelf(Opens below)) 1 Available 00001478130

Includes index and references : p. 241-252.

Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave-phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics.

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