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Principles and applications of NanoMEMS physics /

Principles and applications of NanoMEMS physics / edited by Hector De Los Santos. - Dordrecht, Netherlands : Springer, 2005. - vx, 254 p. : ill. ; 24 cm. - Microsystems ; v. 15. . - Microsystems (Series) ; v. 15. .

Includes index and references : p. 241-252.

Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave-phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics.

ISBN: 1402032382 RM414.74

Subjects--Topical Terms:
Quantum electronics.
Wave-particle duality.
Nanotechnology.
Microelectromechanical systems.

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