Semiconductor industry : wafer fab exhaust management / J. Michael Sherer

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Publication details: Boca Raton : CRC/Taylor & Francis, 2005Description: 194 p. ; 25 cmISBN:

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Holdings
Item type	Current library	Home library	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TK7871.85.S46 3 (Browse shelf(Opens below))		1	Available		00001464055

Includes bibliographical refrences and index

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