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Semiconductor industry : wafer fab exhaust management /

Sherer, J. Michael, 1958-

Semiconductor industry : wafer fab exhaust management / Wafer fab exhaust management J. Michael Sherer - Boca Raton : CRC/Taylor & Francis, 2005 - 194 p. ; 25 cm.

Includes bibliographical refrences and index

ISBN: 1574447203 (alk. paper) RM535.93

Subjects--Topical Terms:
Semiconductor wafers--Design and construction
Semiconductor industry--Environmental aspects
Volatile organic compounds--Environmental aspects
Air--Purification--Technological innovations

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