Electron-beam technology in microelectronic fabrication / (Record no. 67047)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00919nam a2200265 a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250930094016.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 981208s1980 xxua b 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 012133550X |
| Terms of availability | 24.95 (est.) |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] | |
| Level of rules in bibliographic description | 201008031736 |
| Level of effort used to assign nonsubject heading access points | zaina |
| y | 08-18-1999 |
| z | load |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) | |
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) | TK7874.E48 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) | |
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) | TK7874 |
| Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) | .E84 |
| 245 10 - TITLE STATEMENT | |
| Title | Electron-beam technology in microelectronic fabrication / |
| Statement of responsibility, etc. | edited by George R. Brewer |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | Academic Press, |
| Date of publication, distribution, etc. | 1980 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 362 p. : |
| Other physical details | ill. ; |
| Dimensions | 23 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographies and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics |
| 9 (RLIN) | 60418 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Lithography, Electron beam |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Brewer, George R. |
| Fuller form of name | (George Raymond), b.1922 |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b10651469 |
| b | 2021-05-28 |
| c | 2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | AM |
| Suppress in OPAC | No |
| Call number prefix | TK7874.E48 |
| 914 ## - VTLS Number | |
| VTLS Number | vtls000067707 |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) | |
| a | Fakulti Sains Fizik dan Gunaan |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| Library | PERPUSTAKAAN TUN SERI LANANG |
| Operator's initials, OID (RLIN) | 1999-05-08 |
| Cataloger's initials, CIN (RLIN) | m |
| Material Type (Sierra) | Printed Books |
| Language | English |
| Country | |
| -- | 0 |
| -- | .b10651469 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Inventory number | Total checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PERPUSTAKAAN TUN SERI LANANG | PERPUSTAKAAN TUN SERI LANANG | PILIH SIMPAN-P. TUN SERI LANANG (ARAS 1) | 12/11/2019 | - | 0.00 | .i11562468 | 9 | TK7874.E48 | 00000048883 | 13/09/2025 | 1 | 13/09/2025 | AM |