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Electron-beam technology in microelectronic fabrication /

Electron-beam technology in microelectronic fabrication / edited by George R. Brewer - New York : Academic Press, 1980 - 362 p. : ill. ; 23 cm.

Includes bibliographies and index

ISBN: 012133550X 24.95 (est.)

Subjects--Topical Terms:
Microelectronics
Lithography, Electron beam

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Electron-beam technology in microelectronic fabrication /

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