Silicon wet bulk micromachining for MEMS / (Record no. 634197)

MARC details
000 -LEADER
fixed length control field 01251nam a2200361 i 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20250919130205.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 181207s2017 si 100 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9789814613729
Qualifying information hardcover
Terms of availability RM540.58
039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE]
Level of rules in bibliographic description 201812311104
Level of effort used to assign nonsubject heading access points zakir
y 12-07-2018
z yah
040 ## - CATALOGING SOURCE
Original cataloging agency UKM
Description conventions rda
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN)
Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) TK7875.P35 3
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN)
Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) TK7875
Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) .P35 3
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Pal, Prem, e author.
245 00 - TITLE STATEMENT
Title Silicon wet bulk micromachining for MEMS /
Statement of responsibility, etc. Prem Pal, Kazuo Sato.
264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE
Place of production, publication, distribution, manufacture Pan Stanford :
Name of producer, publisher, distributor, manufacturer Singapore ,
Date of production, publication, distribution, manufacture, or copyright notice [2017].
264 4# - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE
Date of production, publication, distribution, manufacture, or copyright notice ©2017.
300 ## - PHYSICAL DESCRIPTION
Extent xii, 424 pages :
Other physical details ilustrations (some color) ;
Dimensions 24 cm.
336 ## - CONTENT TYPE
Content type term text
Source rdacontent
337 ## - MEDIA TYPE
Media type term unmediated
Source rdamedia
338 ## - CARRIER TYPE
Carrier type term volume
Source rdacarrier
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliogarphical references and index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microelectromechanical systems.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Micromachining.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Sato, Kazuo,
Relator term athour.
907 ## - LOCAL DATA ELEMENT G, LDG (RLIN)
a .b16660432
b 2025-07-18
c 2019-11-12
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type AM
Suppress in OPAC No
Call number prefix TK7875.P35 3
914 ## - VTLS Number
VTLS Number vtls003641338
990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA]
Link information for 9XX fields zak
991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT)
a Institut Kejuruteraan Mikro & Nanoelektronik (IMEN)
998 ## - LOCAL CONTROL INFORMATION (RLIN)
Library PERPUSTAKAAN LINGKUNGAN KEDUA
Operator's initials, OID (RLIN) 2018-07-12
Cataloger's initials, CIN (RLIN) m
Material Type (Sierra) Printed Books
Language English
Country
-- 0
-- .b16660432
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Source of acquisition Coded location qualifier Cost, normal purchase price Inventory number Total checkouts Total renewals Full call number Barcode Date last seen Copy number Price effective from Koha item type
        PERPUSTAKAAN LINGKUNGAN KEDUA PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA 12/11/2019 - 1 540.58 .i21166572 8 1 TK7875.P35 3 00002230230 19/09/2025 1 19/09/2025 AM

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