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Silicon wet bulk micromachining for MEMS /

Pal, Prem, e author.

Silicon wet bulk micromachining for MEMS / Prem Pal, Kazuo Sato. - xii, 424 pages : ilustrations (some color) ; 24 cm.

Includes bibliogarphical references and index.

ISBN: 9789814613729 RM540.58

Subjects--Topical Terms:
Microelectromechanical systems.
Micromachining.

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Silicon wet bulk micromachining for MEMS /

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