Sputtering materials for VLSI and thin film devices / (Record no. 569678)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01366nam a2200349 i 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250930135538.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 140515s2014 maua b 001 0 eng c |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780815515937 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0815515936 |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (OCoLC)ocn868205582 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] | |
| y | 05-15-2014 |
| z | zabidah |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | StDuBDS |
| Language of cataloging | eng |
| Description conventions | rda |
| Transcribing agency | CUD |
| Modifying agency | OCLCO |
| -- | CUI |
| -- | UKMGB |
| -- | IXA |
| -- | UKM |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7874 |
| Item number | .S275 2014 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Sarkar, Jaydeep |
| Titles and words associated with a name | (Materials scientist), |
| Relator term | author. |
| 245 10 - TITLE STATEMENT | |
| Title | Sputtering materials for VLSI and thin film devices / |
| Statement of responsibility, etc. | Jaydeep Sarkar. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Place of production, publication, distribution, manufacture | Waltham, USA : |
| Name of producer, publisher, distributor, manufacturer | Elsevier, WA, William Andrew is an imprint of Elsevier, |
| Date of production, publication, distribution, manufacture, or copyright notice | 2014. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | x, 603 pages : |
| Other physical details | illustrations ; |
| Dimensions | 25 cm |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Content type code | txt |
| Source | rdacontent |
| 337 ## - MEDIA TYPE | |
| Media type term | unmediated |
| Media type code | n |
| Source | rdamedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | volume |
| Carrier type code | nc |
| Source | rdacarrier |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics |
| General subdivision | Materials. |
| 9 (RLIN) | 60417 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Flat panel displays |
| General subdivision | Materials. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Sputtering (Physics) |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b15900678 |
| b | 2019-11-13 |
| c | 2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Suppress in OPAC | No |
| 914 ## - VTLS Number | |
| VTLS Number | vtls003559389 |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) | |
| a | Fakulti Kejuruteraan dan Alam Bina |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| Library | |
| Operator's initials, OID (RLIN) | 2014-02-05 |
| Cataloger's initials, CIN (RLIN) | m |
| Material Type (Sierra) | Printed Books |
| Language | English |
| Country | |
| -- | 0 |
| -- | .b15900678 |
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