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Sputtering materials for VLSI and thin film devices /

Sarkar, Jaydeep (Materials scientist),

Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar. - x, 603 pages : illustrations ; 25 cm

Includes bibliographical references and index.

ISBN: 9780815515937 0815515936

Subjects--Topical Terms:
Microelectronics--Materials.
Flat panel displays--Materials.
Sputtering (Physics)

LC Class. No.: TK7874 / .S275 2014

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