MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01460nam a22003617a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20250918162028.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
120515s2012 enka b 000 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781437778595 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1437778593 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201209211550 |
| Level of effort used to assign nonsubject heading access points |
baiti |
| Level of effort used to assign subject headings |
201207250905 |
| Level of effort used to assign classification |
idah |
| Level of effort used to assign subject headings |
201205151255 |
| Level of effort used to assign classification |
idah |
| y |
05-15-2012 |
| z |
idah |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UKM |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TJ1280.A388 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TJ1280 |
| Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) |
.A388 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Advances in CMP/polishing technologies for the manufacture of electronic devices / |
| Statement of responsibility, etc. |
edited by Toshiro Doi, Ioan D. Marinescu, Syuhei Kurokawa. |
| 246 10 - VARYING FORM OF TITLE |
|---|
| Title proper/short title |
CMP polishing technologies for the manufacture of electronic devices |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Oxford : |
| Name of publisher, distributor, etc. |
Elsevier, |
| Date of publication, distribution, etc. |
c2012. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii, 317 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Grinding and polishing. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Chemical mechanical planarization. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Electrolytic polishing. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Doi, Toshiro K., |
| Dates associated with a name |
1947- |
| Relationship |
edt |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Marinescu, Ioan D. |
| Relationship |
edt |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Kurokawa, Syuhei |
| Relationship |
edt |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
|---|
| a |
.b15362310 |
| b |
2019-11-12 |
| c |
2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
AM |
| Suppress in OPAC |
No |
| Call number prefix |
TJ1280.A388 |
| 914 ## - VTLS Number |
|---|
| VTLS Number |
vtls003500615 |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] |
|---|
| Link information for 9XX fields |
baiti |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) |
|---|
| a |
Fakulti Kejuruteraan dan Alam Bina |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) |
|---|
| Library |
PERPUSTAKAAN TUN SERI LANANG |
| Operator's initials, OID (RLIN) |
2012-02-05 |
| Cataloger's initials, CIN (RLIN) |
m |
| Material Type (Sierra) |
Printed Books |
| Language |
English |
| Country |
|
| -- |
0 |
| -- |
.b15362310 |
