Nanoparticle engineering for chemical-mechanical planarization (Record no. 444366)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01782nam a22004218a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250918005806.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS | |
| fixed length control field | m d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr cn ---ancau |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 090624s20099999flu sb 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 2008-051282 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781420059113 |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | 15541280 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] | |
| Level of rules in bibliographic description | 200907080914 |
| Level of effort used to assign nonsubject heading access points | puitm2 |
| Level of effort used to assign subject headings | 200907011523 |
| Level of effort used to assign classification | zainah |
| y | 06-24-2009 |
| z | puitm2 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | UKM |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815/2 |
| Edition information | 22 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) | |
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) | TK7874.84 |
| Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) | .P35 2009 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Paik, Ungyu |
| 245 10 - TITLE STATEMENT | |
| Title | Nanoparticle engineering for chemical-mechanical planarization |
| Medium | [electronic resource] : |
| Remainder of title | fabrication of next-generation nanodevices / |
| Statement of responsibility, etc. | authors, Ungyu Paik, Jea-Gun Park |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boca Raton : |
| Name of publisher, distributor, etc. | Taylor & Francis, |
| Date of publication, distribution, etc. | 2009 |
| 500 ## - GENERAL NOTE | |
| General note | Access to'http://www.engnetbase.com/ejournals/search/advsearch1.asp' and type the title. You may access the full text after you type in the advanced search screen |
| 500 ## - GENERAL NOTE | |
| General note | 'A CRC title' |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Chemical mechanical planarization |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Nanoparticles |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Nanoelectronics |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Park, Jea-Gun |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://eresourcesptsl.ukm.remotexs.co/login?url=http://www.engnetbase.com/ejournals/search/advsearch1.asp">https://eresourcesptsl.ukm.remotexs.co/login?url=http://www.engnetbase.com/ejournals/search/advsearch1.asp</a> |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | CRCnetBASE |
| Uniform Resource Identifier | <a href="http://www.engnetbase.com/ejournals/books/book_km.asp?id=7464">http://www.engnetbase.com/ejournals/books/book_km.asp?id=7464</a> |
| Public note | Click here for the electronic version |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b14521167 |
| b | 2022-04-06 |
| c | 2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Suppress in OPAC | No |
| Call number prefix | TK7874.84 .P35 2009 |
| 914 ## - VTLS Number | |
| VTLS Number | vtls003411854 |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
| a | 7 |
| b | cbc |
| c | orignew |
| d | 1 |
| e | ecip |
| f | 20 |
| g | y-gencatlg |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | Liza |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| Library | |
| Operator's initials, OID (RLIN) | 2009-11-06 |
| Cataloger's initials, CIN (RLIN) | m |
| Material Type (Sierra) | E-Book |
| Language | English |
| Country | |
| -- | 0 |
| -- | .b14521167 |
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