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Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices /

Paik, Ungyu

Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices / [electronic resource] : authors, Ungyu Paik, Jea-Gun Park - Boca Raton : Taylor & Francis, 2009

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Includes bibliographical references and index

ISBN: 9781420059113

LCCN: 2008-051282

Subjects--Topical Terms:
Chemical mechanical planarization
Nanoparticles
Nanoelectronics

Dewey Class. No.: 621.3815/2

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Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices /

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