MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01206cam a2200313 a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20250914135204.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
050203s1998 xxua b 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0824799534 (hbk.) |
| Terms of availability |
RM703.50 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201104271608 |
| Level of effort used to assign nonsubject heading access points |
zabidah |
| Level of effort used to assign subject headings |
200503221144 |
| Level of effort used to assign classification |
hamudah |
| Level of effort used to assign subject headings |
200503221039 |
| Level of effort used to assign classification |
hamka |
| Level of effort used to assign subject headings |
200502171041 |
| Level of effort used to assign classification |
ariff |
| y |
02-03-2005 |
| z |
idah |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7836.M525 3 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7836 |
| Local cutter number (OCLC) ; Book number/undivided call number, CALL (RLIN) |
.M525 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Microlithography : |
| Remainder of title |
science and technology / |
| Statement of responsibility, etc. |
edited by James R. Sheats, Bruce W. Smith |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York : |
| Name of publisher, distributor, etc. |
Marcel Dekker, |
| Date of publication, distribution, etc. |
1998 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii, 780 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microlithography |
| General subdivision |
Industrial applications |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Masks |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Metal oxide semiconductors, complementary |
| General subdivision |
Design and construction |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Manufacturing processes |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Sheats, James R., |
| Dates associated with a name |
1948- |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Smith, Bruce W., |
| Dates associated with a name |
1959- |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
|---|
| a |
.b13478114 |
| b |
2021-05-28 |
| c |
2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
AM |
| Suppress in OPAC |
No |
| Call number prefix |
TK7836.M525 3 |
| 914 ## - VTLS Number |
|---|
| VTLS Number |
vtls003299914 |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] |
|---|
| Link information for 9XX fields |
maa |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) |
|---|
| a |
Jabatan Kejuruteraan Awam dan Struktur |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) |
|---|
| Library |
PERPUSTAKAAN LINGKUNGAN KEDUA |
| Operator's initials, OID (RLIN) |
2005-03-02 |
| Cataloger's initials, CIN (RLIN) |
m |
| Material Type (Sierra) |
Printed Books |
| Language |
English |
| Country |
|
| -- |
0 |
| -- |
.b13478114 |
