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Microlithography : science and technology /

Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith - New York : Marcel Dekker, 1998 - xii, 780 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 0824799534 (hbk.) RM703.50

Subjects--Topical Terms:
Microlithography--Industrial applications
Integrated circuits--Masks
Metal oxide semiconductors, complementary--Design and construction
Manufacturing processes

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