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| 005 | 20250913124950.0 | ||
| 008 | 981208s1980 ne a 001 0 eng d | ||
| 010 | _a80-13154 | ||
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_aFine line lithography / _cedited by Roger Newman |
| 260 |
_aAmsterdam : _bNorth-Holland Publishing Company, _c1980 |
||
| 300 |
_a481 p. : _bill. ; _c24 cm. |
||
| 440 | 0 |
_aMaterials processing, theory and practices ; _vvol. 1 |
|
| 504 | _aIncludes bibliographical references (p.477-478) and index | ||
| 650 | 0 |
_aIntegrated circuits _xLarge scale integration |
|
| 650 | 0 | _aLithography | |
| 700 | 1 | _aNewman, Roger | |
| 907 |
_a.b10775468 _b2021-05-28 _c2019-11-12 |
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_c01 _n0 _kTK7874.F56 |
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| 991 | _aFakulti Kejuruteraan | ||
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_al _b1999-05-08 _cm _da _feng _gne _y0 _z.b10775468 |
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