| 000 | 01095nam a2200313 a 4500 | ||
|---|---|---|---|
| 005 | 20250913123715.0 | ||
| 008 | 981208s1986 xxua b 001 eng | ||
| 020 | _a0120771209 | ||
| 039 | 9 |
_a201002021830 _bjamil _y08-18-1999 _zload |
|
| 040 | _aUKM | ||
| 090 | _aTK7871.85.E65 | ||
| 090 |
_aTK7871.85 _b.E65 |
||
| 245 | 0 | 0 |
_aEpitaxial silicon technology / _cedited by B. Jayant Baliga |
| 260 |
_aOrlando, Fla. : _bAcademic Press, _c1986 |
||
| 300 |
_a328 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographies and index | ||
| 505 | 0 | _aSilicon vapor phase epitaxy/H.M. Liaw and J.W. Rose. Silicon molecular beam epitaxy/B. Jayant Baliga. [et al.] | |
| 650 | 0 |
_aSmiconductors _xDesign and construction |
|
| 650 | 0 |
_aSilicon crystals _xGrowth |
|
| 650 | 0 | _aEpitaxy | |
| 700 | 1 |
_aBaliga, B. Jayant, _d1948- |
|
| 907 |
_a.b10699740 _b2021-05-28 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7871.85.E65 |
||
| 914 | _avtls000072741 | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 991 | _aFakulti Kejuruteraan | ||
| 998 |
_al _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b10699740 |
||
| 999 |
_c71862 _d71862 |
||