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| 005 | 20250919174655.0 | ||
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| 007 | cr nn 008maaau | ||
| 008 | 100623s2009 mau j eng d | ||
| 020 |
_a9780387683515 _qelectronic book |
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| 039 | 9 |
_y06-23-2010 _zmuhaimin |
|
| 082 | 0 | 4 |
_a621.381045 _222 |
| 100 | 1 | _aSolgaard, Olav. | |
| 245 | 1 | 0 |
_aPhotonic microsystems _h[electronic resource] : _bmicro and nanotechnology applied to optical devices and systems / _cby Olav Solgaard. |
| 260 |
_aBoston, MA : _bSpringer-Verlag US, _c2009. |
||
| 300 |
_axvi, 631 pages : _billustrations, digital. |
||
| 440 | 0 |
_aMEMS reference shelf, _x1936-4407 |
|
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aPhotonics. | |
| 650 | 0 |
_aOptoelectronic devices _xDesign and construction. |
|
| 650 | 0 | _aOptical communications. | |
| 650 | 2 | 4 | _aNanotechnology and Microengineering. |
| 650 | 2 | 4 | _aApplied Optics, Optoelectronics, Optical Devices. |
| 650 | 2 | 4 | _aCircuits and Systems. |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 856 | 4 | 0 | _uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-0-387-68351-5 |
| 907 |
_a.b1474563x _b2024-02-13 _c2019-11-12 |
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| 942 | _n0 | ||
| 914 | _avtls003435482 | ||
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