000			01723nam a2200457 a 4500
005			20250919174652.0
006			m d
007			cr nn 008maaau
008			100623s2009 mau j eng d
020			_a9780387686097 (electronic bk.)
020			_a9780387362298 (paper)
035			_a(Springer)978-0-387-36229-8
039		9	_y06-23-2010 _zmuhaimin
050		4	_aTK7872.T55 _bF86 2009
082	0	4	_a621.38152 _222
090			_aTK7872.T55 _bF979 2009
245	0	0	_aFunctional thin films and nanostructures for sensors _h[electronic resource] : _bsynthesis, physics and applications / _cedited by Jeffrey Fortin, Anis Zribi.
260			_aBoston, MA : _bSpringer-Verlag US, _c2009.
300			_axvii, 213 p. : _bill., digital ; _c24 cm.
440		0	_aIntegrated analytical systems
650		0	_aThin film devices.
650		0	_aNanoelectromechanical systems.
650		0	_aDetectors.
650	2	4	_aNanotechnology.
650	1	4	_aMaterial Science.
650	2	4	_aCharacterization and Evaluation of Materials.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aOptical and Electronic Materials.
700	1		_aZribi, Anis.
700	1		_aFortin, Jeffrey.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttps://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/b138612
907			_a.b14744570 _b2024-10-15 _c2019-11-12
942			_n0 _kTK7872.T55 F979 2009
914			_avtls003435373
998			_ae0001 _b2010-10-06 _cm _da _feng _gmau _y0 _z.b14744570
999			_c677940 _d677940