000 01226nam a2200325 i 4500
008 200219s2003 ii a 000 0 eng d
020 _a9788126525805
_qpaperback
_cRM204.30 (PTSL)
040 _aUKM
_erda
090 _aTK7875
_b.R43 2003 3
100 1 _aRebeiz, Gabriel M.,
_eauthor.
245 1 0 _aRF MEMS :
_btheory, design and technology /
_cGabriel M. Rebeiz.
250 _aWiley-India Edition.
264 1 _aIndia :
_bWiley India,
_c2003.
264 4 _c©2003.
300 _axx, 483 pages :
_billustrations ;
_c23 cm.
336 _atext
_2rdacontent
337 _aunmediated
_2rdamedia
338 _avolume
_2rdacarrier
650 0 _aMicroelectromechanical systems.
650 0 _aIntegrated circuits
_xDesign and construction.
650 0 _aMicrowave devices.
650 0 _aRadio frequency.
907 _a.b17061714
_b2025-07-14
_c2025-03-13
942 _c01
_n0
_kTK7875 .R43 2003 3
949 _o101038242
990 _aHamz/RH
991 _aInstitut Kejeruteraan Mikro & Nanoelektrik (IMEN)
998 _al
_b2025-05-25
_cm
_da
_feng
_gii
_y0
_z.b17061714
999 _c672777
_d672777