| 000 | 00974nam a2200289 a 4500 | ||
|---|---|---|---|
| 008 | |||
| 020 | _a0442319509 | ||
| 090 |
_aTH7694 _b.K88c 1991 9 |
||
| 100 | 1 |
_aKozicki, M. _q(Michael), _d1958- _eauthor. |
|
| 245 | 1 | 0 |
_aCleanrooms : _bfacilities and practices / _cM. Kozicki with S. Hoenig and P. Robinson. |
| 264 | 1 |
_aNew York : _bVan Nostrand Reinhold, _c1991. |
|
| 264 | 4 | _c©1991. | |
| 300 |
_ax, 374 p. : _bill. ; _c24 cm. |
||
| 336 |
_atext _2rdacontent |
||
| 337 |
_aunmediated _2rdamedia |
||
| 338 |
_avolume _2rdacarrier |
||
| 504 | _aIncludes index. | ||
| 650 | 0 | _aClean rooms. | |
| 700 | 1 |
_aHoenig, Stuart A. _eauthor. |
|
| 700 | 1 |
_aRobinson, P. J. _q(Patrick J.) _eauthor. |
|
| 907 |
_a.b17044674 _b2024-09-13 _c2024-09-13 |
||
| 942 |
_c01 _n0 _kTH7694 .K88c 1991 9 |
||
| 949 | _o900095651 | ||
| 990 | _amfh | ||
| 991 | _aPerpustakaan Dr. Abdul Latiff | ||
| 998 |
_ad _b2024-09-13 _cm _da _feng _gnyu _y0 _z.b17044674 |
||
| 999 |
_c671101 _d671101 |
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