| 000 | 00919nam a2200265 a 4500 | ||
|---|---|---|---|
| 005 | 20250930094016.0 | ||
| 008 | 981208s1980 xxua b 001 0 eng d | ||
| 020 |
_a012133550X _c24.95 (est.) |
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| 039 | 9 |
_a201008031736 _bzaina _y08-18-1999 _zload |
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| 090 | _aTK7874.E48 | ||
| 090 |
_aTK7874 _b.E84 |
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| 245 | 1 | 0 |
_aElectron-beam technology in microelectronic fabrication / _cedited by George R. Brewer |
| 260 |
_aNew York : _bAcademic Press, _c1980 |
||
| 300 |
_a362 p. : _bill. ; _c23 cm. |
||
| 504 | _aIncludes bibliographies and index | ||
| 650 | 0 |
_aMicroelectronics _960418 |
|
| 650 | 0 | _aLithography, Electron beam | |
| 700 | 1 |
_aBrewer, George R. _q(George Raymond), b.1922 |
|
| 907 |
_a.b10651469 _b2021-05-28 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7874.E48 |
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| 914 | _avtls000067707 | ||
| 991 | _aFakulti Sains Fizik dan Gunaan | ||
| 998 |
_at _b1999-05-08 _cm _da _feng _gxxu _y0 _z.b10651469 |
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| 999 |
_c67047 _d67047 |
||