000 01269nam a2200313 a 4500
008 200218s2019 a 000 0 may d
040 _aUKM
_erda
090 _aTK6478
_b.H337 2019 3 tesis
100 0 _aHaslinawati Mohd Mustapha
_eauthor.
245 0 0 _aRekabentuk dan fabrikasi mikrofon kapasitif MEMS berdiafragma grafin-PMMA /
_cHaslinawati Mohd Mustapha.
264 _c2019©.
300 _axviii, 132 pages :
_billustrations ;
_c30 cm. + \e 2 computer optical discs (4 3/4 in.).
336 _atext
_2rdacontent
337 _aunmediated
_2rdamedia
338 _avolume
_2rdacarrier
502 _aTesis (Ph.D) - Universiti Kebangsaan Malaysia, 2019.
504 _aRujukan : mukasurat 124-132.
610 2 0 _aUniversiti Kebangsaan Malaysia
_xDissertations.
_962865
650 _aDissertations, Academic
_zMalaysia.
_962866
650 _aMicrophone.
650 _aMicroelectromechanical system.
907 _a.b16794059
_b2021-11-10
_c2020-02-18
942 _c3
_n0
_kTK6478 .H337 2019 3 tesis
949 _o1010002612 (3)
990 _asmy
991 _aInstitut Kejuruteraan Mikro dan Nanoelektronik
998 _al0013
_b
_cm
_dx
_fmay
_gmy
_y0
_z.b16794059
999 _c646874
_d646874