| 000 | 01294nam a2200349 i 4500 | ||
|---|---|---|---|
| 005 | 20250919130308.0 | ||
| 008 | 190122t2018 my a g bi 001 0 may | ||
| 020 |
_a9789674126681 _qpaperback _cHadiah |
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| 039 | 9 |
_a201907031201 _brahah _c201906271426 _dazam _c201902191129 _dlan _c201902130938 _djamain _y01-22-2019 _zazam |
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| 040 |
_aUKM _erda |
||
| 090 | _aTK7875.S443 3 | ||
| 090 |
_aTK7875 _b.S443 3 |
||
| 245 | 1 |
_aSensor dan aktuator MEMS perkembangan & kegunaan / _cdisunting oleh Burhanuddin Yeop Majlis. |
|
| 264 | 1 |
_aBangi, Selangor : _bPenerbit Universiti Kebangsaan Malaysia, _c2018. |
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| 264 | 4 | _c©2018. | |
| 300 |
_a293 pages : _billustrations ; _c23 cm. |
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| 336 |
_atext _2rdacontent |
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| 337 |
_aunmediated _2rdamedia |
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| 338 |
_avolume _2rdacarrier |
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| 504 | _aIncludes bibliographical references : pages [269]-283) and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aActuators. | |
| 650 | 0 | _aDetectors. | |
| 700 | 0 |
_aBurhanuddin Yeop Majlis, _eeditor. |
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| 907 |
_a.b16678497 _b2019-11-12 _c2019-11-12 |
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| 942 |
_c01 _n0 _kTK7875.S443 3 |
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| 914 | _avtls003643205 | ||
| 990 | _aaaw/jm | ||
| 991 | _aInstitut Kejuruteraan Mikro dan Nanoelektronik (IMEN) | ||
| 998 |
_al _at _b2019-09-01 _cm _da _fmay _gmy _y0 _z.b16678497 |
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| 999 |
_c635941 _d635941 |
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