| 000 | 01251nam a2200361 i 4500 | ||
|---|---|---|---|
| 005 | 20250919130205.0 | ||
| 008 | 181207s2017 si 100 0 eng d | ||
| 020 |
_a9789814613729 _qhardcover _cRM540.58 |
||
| 039 | 9 |
_a201812311104 _bzakir _y12-07-2018 _zyah |
|
| 040 |
_aUKM _erda |
||
| 090 | _aTK7875.P35 3 | ||
| 090 |
_aTK7875 _b.P35 3 |
||
| 100 | 1 | _aPal, Prem, e author. | |
| 245 | 0 | 0 |
_aSilicon wet bulk micromachining for MEMS / _cPrem Pal, Kazuo Sato. |
| 264 | 1 |
_aPan Stanford : _bSingapore , _c[2017]. |
|
| 264 | 4 | _c©2017. | |
| 300 |
_axii, 424 pages : _bilustrations (some color) ; _c24 cm. |
||
| 336 |
_atext _2rdacontent |
||
| 337 |
_aunmediated _2rdamedia |
||
| 338 |
_avolume _2rdacarrier |
||
| 504 | _aIncludes bibliogarphical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aMicromachining. | |
| 700 | 1 |
_aSato, Kazuo, _eathour. |
|
| 907 |
_a.b16660432 _b2025-07-18 _c2019-11-12 |
||
| 942 |
_c01 _n0 _kTK7875.P35 3 |
||
| 914 | _avtls003641338 | ||
| 990 | _azak | ||
| 991 | _aInstitut Kejuruteraan Mikro & Nanoelektronik (IMEN) | ||
| 998 |
_al _b2018-07-12 _cm _da _feng _gsi _y0 _z.b16660432 |
||
| 999 |
_c634197 _d634197 |
||